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International Symposium for Testing and Failure Analysis 2016

  • Fort Worth Convention Center 1201 Houston St Fort Worth, TX (map)

SH Lau will be presenting on Sigray's latest developments for high throughput compositional mapping of trace elements and contaminants at micron-scale in micron-scale in wafer and packaging. 

Discussed will be a technique for mapping the distribution and concentrations of trace elements, most notably with capabilities of achieving 1-10 parts per million sensitivities within 1 second and at <8 µm resolution. The technique features an innovative, high flux microstructured x-ray source and a new approach to x-ray optics comprising a high efficiency twin paraboloidal x-ray mirror lens. The resulting ability to acquire dramatically higher sensitivities and resolution than conventional x-ray fluorescence approaches, and at substantially higher throughput enables powerful compositional mapping for failure analysis, process development, and process monitoring.