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NIST X-ray Metrology for Semiconductor Workshop

  • NIST 100 Bureau Dr Gaithersburg, MD (map)

Dr. Wenbing Yun will be presenting at the NIST workshop on X-ray Metrology for the Semiconductor Industry in Gaithersburg, MD. Discussed in the workshop will be new approaches and techniques for Critical Dimension Small Angle X-ray Scattering (CD-SAXS).