AttoMap Micro X-ray Fluorescence

compositional analysis and mapping
with micro x-ray fluorescence

The Sigray AttoMap™ is a powerful x-ray analytical microscope with the highest resolution and highest sensitivity laboratory micro x-ray fluorescence (microXRF) capabilities available, enabled by patented technology.

  • Highest resolution micro x-ray fluorescence

  • Rapid throughput down to 5 ms/point

  • Unprecedented sensitivity of sub parts per million... within 1 second, up to orders of magnitude higher in sensitivity than alternative techniques such as SEM-EDS




Dopant Concentrations and Thin Film Thickness

Quantitative analysis of thin films, coatings, and buried layers down to sub-atomic equivalent thicknesses and dopants at 10^14 atoms/cm^2 can be obtained through standard-less fundamental parameters or with standards. Thickness variations at the microns-scale can be determined.



Trace Element & Nanoparticle Analysis

The AttoMap provides unprecedented sensitivity of sub-femtogram (and sub-ppm) to measure the distribution of multiple elements simultaneously.

Applications include: rare earth elements in geological samples, nanoparticles (e.g. 50-100 nm), metallomics, forensics, contaminants in advanced materials, and more.



Mineralogy for Mining & Oil and Gas

Measurements and elemental imaging to determine co-location of trace-level minerals and rare earth elements at ppm-scale is possible at microns-scale



Quantitative Composition

Elemental composition and their relative percentages can be obtained for both point analysis and for larger regions, including specific regions of interest or the complete sample. Data is acquired and stored as a hypermap, with each pixel and its spectra, for ultimate flexibility in analysis.

What is MicroXRF?

Micro x-ray fluorescence is a powerful spatially-resolved elemental mapping and chemical microanalysis technique. Under x-ray illumination, a sample will produce characteristic x-rays that can be analyzed to determine composition.

MicroXRF advantages include:

  • Higher sensitivity (in comparison to electron-based techniques such as microprobes)
  • Non-destructive for in situ or in operando analysis of elemental migration
  • Simultaneous detection of multiple elements and no sample preparation required
X-ray Fluorescence.jpg

AttoMap Innovations and Advantages


Compare to leading conventional microXRFs:

  1. Highest resolution: <8-12 um spot
  2. Highest sensitivity: sub-ppm & sub-femtogram
  3. Fastest: single minute  vs. half a day for equivalent measurements, with up to 100X throughput
  4. Most accurate quantification, due to achromatic focusing
  5. Superior sample flexibility for large and heavy samples or uneven sample surfaces
  6. Correlative capabilities within a single system (includes 2D x-ray microscopy and optical microscopy)

Technology for Synchrotron Performance

How does the AttoMap achieve its Superior Performance?

The AttoMap features key innovations in its:

  1. High brightness x-ray source with 50X brightness of microfocus sources used in conventional microXRFs
  2. Paraboloidal x-ray optics with major advantages over conventional polycapillary microXRF systems, including 
  3. Unique detector geometry with 3-4X collection angle than conventional systems

Advantage 1: x-ray source

50X Brightness: Sigray's ultrahigh brightness x-ray source features an innovative x-ray target comprised of multiple materials in close thermal contact with a diamond substrate. The breakthrough design allows: 1) rapid thermal dissipation through the diamond substrate which allows the x-ray target metals to remain cool under dramatically higher power loading, and 2) linear accumulation of x-rays for laser-like brightness. 

Fluorescence cross-sections of elements (rows) as a function of excitation energy (column). The selection of illumination energy can affect sensitivity to elements by orders of magnitude.&nbsp;

Fluorescence cross-sections of elements (rows) as a function of excitation energy (column). The selection of illumination energy can affect sensitivity to elements by orders of magnitude. 

Multi-Energy Target: X-ray fluorescence is highly dependent on the energy of the illuminating x-ray beam and can vary by several orders of magnitude. Sigray's multi-target source provides easy software-selection of target materials to ensure the ultimate sensitivity for each element. No other microXRF system offers multiple x-ray targets. 

Advantage 2: x-ray optic

Highest Performance Optic: The AttoMap is the only microXRF that uses a double paraboloidal x-ray optic, which Sigray manufactures through the same proprietary fabrication process it uses to create specialty synchrotron optics. Other microXRFs use conventional laboratory x-ray optics, such as polycapillaries (or tapered monocapillaries). The double paraboloidal optic provides major advantages in: resolution, quantitative capabilities, analytical flexibility, and x-ray flux at the sample. 

Advantage 3: detector geometry

The long working distance and compact form factor of the double paraboloidal x-ray optic enables a unique geometry in which multiple SDD detectors are placed in close proximity to the object to collect 3-4X more fluorescent x-rays for increased analytical speed. Conventional microXRF systems typically place detectors at an offset angle because polycapillary x-ray optics have a well-known "halo effect" that requires an aperture for removal.

The AttoMap also features a transmission x-ray detector for 2D microscopy and an optical microscope. 

Library: Downloads

Trace Elements in Plants.JPG

Measurement of trace elements in biological materials such as plants (hyperaccumulating, etc)


Measurement of thin films and dopants with sensitivities down to sub-Angstrom.


AttoMap quantification of the composition of different glasses, including contamination and dopants across layers.


AttoMap Information

Interested in how the Sigray AttoMap™ will help your particular application?

For a more in-depth technical overview and to inquire about the performance of the microXRF for your specific application, please fill out the following inquiry form:

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