X-ray Assisted Device Alteration (XADA)
First X-ray based Circuit Debugging
Enables New Backside Power Delivery (BPD) Schemes

Key Advantages:

First X-ray Assisted Device Alteration System

X-ray assisted device alteration (XADA) is the x-ray equivalent of laser assisted device alteration (LADA). In XADA, a highly focused, high flux density beam of x-rays induces a perceptible time delay in circuits to rapidly isolate critical signal paths (“speedpaths”). Sigray’s XADA-200 is a critically needed solution for circuit debugging in for emerging backside power delivery (BPD) schemes, in which the power lines are moved to the backside of the device (see image below). BPD is largely considered to be the future of integrated circuit design, enabling improved efficiency and speed for high performance chips in automobiles, mobile devices, and AI-processing.

BPD is largely considered to be the future of integrated circuit design, enabling improved efficiency and speed for high performance chips in automobiles, mobile devices, and AI-processing. The challenge is that BPD obsoletes LADA because devices can no longer simply be thinned on the backside to allow a NIR laser to penetrate and induce a photoelectric current (or locally heat). By virtue of the penetrating power of X-rays, XADA not only enables circuit debugging in new BPD devices but also requires little to no sample preparation (e.g., backside thinning).

Microns-Scale X-ray Probing

XADA’s small probe size is enabled by patented and patent-pending innovations in x-ray source and x-ray optics technologies.

Sigray is the world leader in x-ray optics and has developed fabrication capabilities under several large government grants over the past decade. The company now supplies its x-ray focusing optics to most of the synchrotron facilities. Due to its heavy R&D investment in x-ray optics, Sigray is the only company in the world that can fabricate double paraboloidal x-ray optics with stringent straightness and surface profile tolerance requirements needed for XADA. Optics used for XADA are fabricated through a patent-pending process that maximizes symmetry and minimizes slope errors. Additional patent-pending innovations in x-ray source and optics are expected to enable Sigray XADA probes to submicron spot sizes in the future.

Using X-rays, 3-4 ps shifts in circuit delays can be seen.

3-4 ps delay seen using Sigray XADA
Configured and Designed for Testers

Sigray collaborated with industrial thought leaders to develop a system with a large and flexible tester area (to accommodate a wide variety of different tester designs). Because tester cables can be expensive, the system was also designed with large cable runs to minimize the cable lengths needed and to enable testers to be moved into and out of the XADA unit without needing to disconnect the cables.

Technical Specifications of XADA

OverallProbe Size<5 μm standard.
1-3 μm available as upgrades.
Operating EnergiesSelectable between 5-9 keV
Time ShiftShift is linear to x-ray exposure.
Examples include a 3-4 ps timeshift noted (will be reported at IPFA).
SourceTypeSigray patented ultrahigh brightness sealed microfocus source
Target(s)Standard 3 target x-ray source.
Selectable from Si, Cr, Cu, Rh, W, Mo, Au, Ti, Ag.
Others available upon request.
Power | Voltage100W | 20-50 kVp
X-ray OpticTypeSigray patent-pending x-ray optics
DimensionsFootprintWLH: 1.7 x 2.9 x 2 meters
Stage Travel150 x 150 mm automated travel
Additional CapabilitiesOther ModalitiesVisible light and/or IR navigation available
SoftwareCustom CAD navigation

*Note: For academic institutions with smaller budgets, Sigray offers a XADA “Lite” version with reduced specifications and flexibility. Inquire with your local sales representatives or fill out the Contact Us form at the bottom of this page.

Contact Us

Interested in how the Sigray XADA™ will help your particular application?
For a quotation and to inquire about a demonstration of the system on your particular research interests, please fill out the following inquiry form and we will get back to you within 1-2 business days.